Compact tabletop, low footprint Monolayer Deposition system. Introduce fast, cost-effective vacuum vapor phase deposition into your research or development laboratory. Minimize toxic chemical usage, and gain high reliability and uniformity for applications requiring precise surface modification.

R&D Tabletop Silane Monolayer Deposition System

Give your research engineers or students the latest in chemical vapor deposition technology to modify surfaces with complete control over the process environment. The YES LabCoat system allows you to form highly stable bonds between formerly incompatible surfaces without damaging the substrate. It can also modify surfaces to repel hydration.

Conduct research on-demand and learn on a tabletop system that is designed with the same patented technologies used in YES’s automated manufacturing systems – so when you’re ready to scale to high-volume production, you can transition seamlessly up to the high-volume production VertaCoat.

With LabCoat, test new chemistries and develop novel vapor coating processes for applications including advanced semiconductor packaging, genomics, medical devices, optics, MEMS, and many more.

YES Vapor Phase Deposition Process

Dehydration followed by silane vapor deposition coating provides a superior silane/substrate bond that is stable after exposure to atmospheric moisture, extending the time available between process steps. The silane vapor deposition process begins with vacuum chamber cycle purges to prepare the substrates. The chamber is evacuated to low pressure and refilled with pure nitrogen several times to completely remove water vapor and oxygen. Once the cycle purges are finished, the LabCoat system pumps chemicals directly from the source bottle to the heated vaporization chamber – without exposing the chemical to moisture or oxygen. The pure chemical vapors require no carrier gas to enter the reaction chamber and bond with the substrates.

  • Compact, tabletop unit ideal for R&D labs
  • Flexible system accommodates a variety of silanes, processes and surfaces
  • Vacuum dehydration followed by silane vapor deposition coating
  • Provides stable surface after exposure to atmospheric moisture
  • Total control over process environment
  • Flexible system accommodates a variety of silanes, processes and surfaces
  • Contact angle repeatability within ±1-3°
  • Angstrom-level thickness control
  • Capacity: 25 150mm wafers or 400 1×3 microscope slides
  • MEMS anti-stiction coating to reduce damaging stiction
  • Photoresist adhesion for semiconductor wafers
  • Covalently bond DNA and proteins to surfaces for microarray preparation
  • Semiconductor fabrication
  • Apply biocompatible anti-fouling coatings to devices
  • Self-assembled monolayer (SAM) for semiconductor applications
  • Conventional Lithography
  • MEMS
  • Biotech and Life Sciences
  • MicroLED
  • Semiconductor
  • Optical Applications

YES Sales

Talk to one of our sales representatives about how the LabCoat can meet your application needs. When you are ready to run process tests, we would be happy to arrange a demonstration using your chemicals and samples.
Contact a YES Customer Development Center