Lower the cost of ownership by more than 30% while minimizing chemical usage for automated high-volume manufacturing. Configure VertaCoat for a wide variety of applications requiring precise surface modification with high throughput and reliability.

Automated Silane Monolayer Deposition System

YES VertaCoat systems are ideal for vapor deposition applications that require the highest standards of reliability. Designed with patented YES technologies, VertaCoat systems offer total control over process and environmental conditions, maximizing wafer coating uniformity. Independent multi-zone heating elements ensure precise thermal control and uniformity throughout the chamber as well as precise particle control (isolation and removal) via the YES horizontal laminar flow. The pure chemical vapors require no carrier gas to enter the reaction chamber and bond with the substrates.
VertaCoat Process Cycle


Vacuum chamber cycle purges to dehydrate the product. The chamber is evacuated to low pressure and refilled with pure nitrogen several times to completely remove water vapor.


Once cycle purges are finished, the YES-VertaCoat pumps the chemical directly from the source bottle to the heated vaporization chamber – without exposing the chemical to moisture.


Chamber is pumped down to remove excess chemical. Vacuum/Nitrogen cycles ensure complete removal. Silane check ensures chamber is safe to vent.

With the added capability to coat surfaces with a wide variety of different organosilanes, VertaCoat systems allow engineers at companies of any size to configure VertaCoat for current and future needs with low cost of ownership.

  • Coating temperatures up to 200°C
  • ≤2.0% temp uniformity with 5-zone temperature control: top, bottom and three zone process
  • Coat surfaces with different organosilanes: up to 5 independent vaporization flasks
  • Coating process environment: <1Torr-100Torr
  • Eco-friendly “green” process
  • SECS/GEM automation software
  • Automated application of monolayer coatings at Angstrom-level thickness
  • Chemical deposition uniformity
  • Contact angle control within +/- 3 degrees
  • Compatible with large selection of organosilanes including PEG and biotin functional compounds
  • Reduced chemical usage over wet chemical processes
  • More than 30% lower CoO vs. wet chemical modification
  • MEMS
    • CVD films are typically self-assembled monolayers (SAMs); used as anti-stiction coatings
  • Lithography
    • HMDS prime for photoresist adhesion
    • As an adhesion layer between the polymer and the substrate
    • As very thin and conformal release layers between the stamp and polymer materials
  • Inkjet
    • To prevent ink accumulation on the nozzle face plate to ensure unrestricted ink flow
  • Bio-devices
    • Silane surface monolayers enable stable, covalent linkage between solid substrates and biomolecules including DNA and protein for microarray manufacture
    • Genomic sequencing flow cell manufacture using uniform silane vapor coatings to achieve consistent biomolecular sample flow through microchannels
    • Selection of silane coating chemistry allows precise tuning of surface hydrophobicity to control fluid flow and promote/prevent adhesion
  • Optical and AR/VR applications
    • To modify optical properties
    • To create nano-imprint layers or passivation layers

YES Sales

Talk to one of our sales representatives about how the VertaCoat can meet your application needs. When you are ready to run process tests, we would be happy to arrange a demonstration using your chemicals and samples.
Contact a YES Customer Development Center