Vacuum bake at high temperature to ensure elimination of surface moisture.
TA Series – This vacuum bake/vapor prime oven rids wafers of surface moisture and chemically bound water molecules.
EcoCoat – These silane vapor deposition systems offer moisture resistant surface modification.
PB Series – This series of vacuum cure ovens is ideal for polyimide and BCB bake. They quickly remove airborne oxygen and water vapor from the chamber gas.