YES EcoClean systems use oxygen and nitrogen atoms created in high-density plasma for cleaning/stripping rather than the gallons of toxic chemicals and water required by wet cleaning systems. By using a downstream resist strip process, EcoClean systems achieve a high removal rate with no electrical damage or defects to substrates.

Our remote source produces a high-density plasma with the advantage of confining charged plasma species within the plasma chamber, ensuring that only charge-neutral species flow from the source and interact with the substrate. The end results are much higher throughput with low gas utilization, lower capital costs, and a safer, greener automated process.