Cassettes, Software, and Parts
Order replacement cassettes and parts as well as YES software for YES Clean, Coat, and Cure systems. You may also request customized cassettes. Fill out the order forms below, including your contact and shipping information. We will contact you soon to complete the order process.
YES cassettes are designed to achieve accurate wafer support with minimal mass. Temperatures remain uniform throughout heat up and cool down applications minimizing hot/cold spots due to heat sinking. Cassettes are placed with the wafers vertically in YES-450PB Series ovens to facilitate the laminar flow process. The result is a better, more uniform process.
YES offers multiple software data collection options to increase visibility and control of your process. The process management systems we offer are designed to make detailed data collection easy: real-time monitoring allows you to quickly react to process upsets.